实绩例表

Customer(客户)Process (制程)Gases (处理气体)应用机台备注
TSMC(台积电)EtchCL2,BCL3,HCL,HBrSHOWA 
TSMC(台积电)PVDNF3,HF,SiH4,DCS,WF6,HCLBOC  GRC 
TSMC(台积电)IMPAsH3,PH3,BF3CS 
SMIC(中芯)Facility  CabinetBCl3,HCL,HBr,NH3…JPC 
CPT (华映)LCD  EtchCL2,BCL3,HCL,HBrSHOWA 
CPT (华映)Facility  CabinetSiH4,NH3,CL2,Air  Lique 
NDL(交大)IMPAsH3,PH3RFE-200AA 
GF  (Chatter)(新加坡)IMPAsH3,PH3,BF3AMAT 
Hanergy (黑龙江汉能)Solar  PECVDSiH4,PH3,GeH4,TMBDemeter-DC  400 
CSUN  (南京中电)Solar  BurnerVOCsHOCDemo
ProMOS (茂德3厂)IMPAsH3,PH3,BF3IPI 
AUO (友达)LCD  Facility  CabinetAsH3,PH3,BF3  ,NF3,NH3大阳日酸 
Hulket 豪客能源Solar  CVD & EMOH2S,H2Se,DEZ,B2H6RFE-500AA 
SMIC深圳EMO,CentralAsH3,  PH3,Apoda 厂务系统 
荣马SolarNOxApoda 
中科信IMPAsH3Apoda 
国电投SolarNOxApoda 
屹唐EtchEtchAPODA  触媒机 
重庆万国EPICL2,BCl3,HCL,HBr,AsH3APODA-DC1K 
杭州士兰IMPAsH3,PH3,BF3APODA-SC