Customer(客户) | Process (制程) | Gases (处理气体) | 应用机台 | 备注 |
TSMC(台积电) | Etch | CL2,BCL3,HCL,HBr | SHOWA | |
TSMC(台积电) | PVD | NF3,HF,SiH4,DCS,WF6,HCL | BOC GRC | |
TSMC(台积电) | IMP | AsH3,PH3,BF3 | CS | |
SMIC(中芯) | Facility Cabinet | BCl3,HCL,HBr,NH3… | JPC | |
CPT (华映) | LCD Etch | CL2,BCL3,HCL,HBr | SHOWA | |
CPT (华映) | Facility Cabinet | SiH4,NH3,CL2, | Air Lique | |
NDL(交大) | IMP | AsH3,PH3 | RFE-200AA | |
GF (Chatter)(新加坡) | IMP | AsH3,PH3,BF3 | AMAT | |
Hanergy (黑龙江汉能) | Solar PECVD | SiH4,PH3,GeH4,TMB | Demeter-DC 400 | |
CSUN (南京中电) | Solar Burner | VOCs | HOC | Demo |
ProMOS (茂德3厂) | IMP | AsH3,PH3,BF3 | IPI | |
AUO (友达) | LCD Facility Cabinet | AsH3,PH3,BF3 ,NF3,NH3 | 大阳日酸 | |
Hulket 豪客能源 | Solar CVD & EMO | H2S,H2Se,DEZ,B2H6 | RFE-500AA | |
SMIC深圳 | EMO,Central | AsH3, PH3, | Apoda 厂务系统 | |
荣马 | Solar | NOx | Apoda | |
中科信 | IMP | AsH3 | Apoda | |
国电投 | Solar | NOx | Apoda | |
屹唐 | Etch | Etch | APODA 触媒机 | |
重庆万国 | EPI | CL2,BCl3,HCL,HBr,AsH3 | APODA-DC1K | |
杭州士兰 | IMP | AsH3,PH3,BF3 | APODA-SC | |